Abstract: Ultra-precision positioning systems basically require high natural frequency and sufficient workspace. To cope with this requirement, flexure hinge mechanisms have been proposed. However, previous designs are hard to satisfy the functional requirements of the system due to difficulty in modeling and optimization process applying the independent axiomatic design. Therefore, this paper suggests a new design and design-order based on semi-coupled, axiomatic design. A spatial 3-DOF parallel type micro mechanism is chosen as an exemplary device. Based on preliminary kinematic analysis and dynamic modeling of the system, an optimal design is conducted. To check the effectiveness of the optimal parameters obtained by theoretical approach, simulation is performed by FEM.