Publication

Hanyang University HumanRobotics Lab

International Journal
Optimum Design of a Planar 3-DOF Ultra-precision Positioning Mechanism using a Booster
Journal
Key Engineering Materials
Vol
Vol. 306
Page
pp. 667-672
Author
S. Y. Han, J. O. Kim, J. Y. Park, B.-J. Yi, and G. B. Chung
Year
2006
Date
2006.12.27
File
Optimum Design of a Planar 3-DOF Ultra-precision Positioning Mechanism using a Booster.pdf (349.8K) 0회 다운로드 DATE : 2020-10-18 16:17:57
Abstract: Ultra-precision positioning systems basically require high natural frequency and sufficient workspace. To cope with this requirement, flexure hinge mechanisms have been proposed. However, previous designs have difficulty satisfying the functional requirements of the system due to problems in the modeling and optimization process since they are coupled. Therefore, this paper performs optimum design of a planar 3-D ultra-precision positioning mechanism using a booster based on axiomatic design. Based on preliminary kinematic analysis and dynamic modeling of the system, an optimum design is conducted. To examine the effectiveness of the optimal parameters obtained by a theoretical approach, a simulation is performed by FEM. The simulation result shows that a natural frequency of 200.53Hz and a workspace of 200 μm x 200 μm can be ensured, which is in very close agreement with the specified goal of design.